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Nanyang Technological University

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

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1.4K Views

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05:04 min

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June 13th, 2023

DOI :

10.3791/65210-v

June 13th, 2023

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Fangzhou Xia¹, Kamal Youcef-Toumi¹, Thomas Sattel², Eberhard Manske³, Ivo W. Rangelow⁴^,⁵

¹Mechatronics Research Lab, Department of Mechanical Engineering, Massachusetts Institute of Technology, ²Mechatronics Group, Department of Mechanical Engineering, Ilmenau University of Technology, ³Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, ⁴Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, ⁵nano analytik GmbH

Podsumowanie

Large-scale sample inspection with nanoscale resolution has a wide range of applications, especially for nanofabricated semiconductor wafers. Atomic force microscopes can be a great tool for this purpose, but are limited by their imaging speed. This work utilizes parallel active cantilever arrays in AFMs to enable high-throughput and large-scale inspections.

Przeglądaj więcej filmów

Active Probe Atomic Force Microscopy

Quattro Parallel Cantilever Arrays

High throughput Imaging

Micro Electromechanical Systems

Active Cantilevers

Piezoresistive Sensors

Nanoscale Surface Studies

Atomic Force Microscope

Imaging Throughput

Multi cantilever Operation

Semiconductor Wafers

Dynamic Process Videos

Data driven Algorithms

Rozdziały w tym wideo

0:00

Introduction

1:23

Instrument Calibration, Experimental Setup, and Parameter Tuning for Semiconductor Wafer Topography Imaging with AFM

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