使用Quattro-Parallel 悬臂阵列的主动探针原子力显微镜，用于高通量大规模样品检测

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05:04 min

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June 13th, 2023

DOI :

10.3791/65210-v

June 13th, 2023

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Fangzhou Xia¹, Kamal Youcef-Toumi¹, Thomas Sattel², Eberhard Manske³, Ivo W. Rangelow⁴^,⁵

¹Mechatronics Research Lab, Department of Mechanical Engineering, Massachusetts Institute of Technology, ²Mechatronics Group, Department of Mechanical Engineering, Ilmenau University of Technology, ³Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, ⁴Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, ⁵nano analytik GmbH

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Introduction

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