In Vitro Multiparametric Cellular Analysis by Micro Organic Charge-modulated Field-effect Transistor Arrays

1:12

Substrate Selection, Preparation, and Floating Gates (FG): Titanium Deposition

2:11

FG Patterning and Gate Dielectric Deposition

3:55

Opening of the Sensing Areas of the OCMFET for Electrical Activity Recording and Formation of the Vias to Access the Back of the FGs

4:46

Self-Alignment of Source and Drain with the FG

5:15

Gold Deposition, Channel Formation, and Patterning of the Sources, Drains, and Control Gates

6:50

Deposition and Activation of the Parylene C for pH Sensing

7:57

Semiconductor Deposition, Culturing Chamber Placing, and Final Cut-Out of the Device from the PET

8:22

Results: Cellular Electrical and Metabolic Activity Recordings with Micro OCMFET Arrays (MOA)

9:27

Conclusion