作者非常感谢来自空军研究实验室的合同FA8650-14-C-6571和DAQRI LLC的资金支持。

1.前期准备注意:用新的X切割铌酸锂晶圆开始。它应该是光学级，厚1毫米，干净，没有沉积在表面上，两面抛光，以及顶侧标记。 <ol><li>使用电子束蒸发器或等效机在50μTorr的真空，蒸发的铝200nm的晶片上以5埃/秒。复制的结果呈现，定位晶圆星座65厘米铝坩埚上方。 </li><li>旋上的正相片30滴抗蚀剂，如AZ3330，以3000rpm进行60秒。 Softbake抗蚀剂在90℃下60秒。注意:对于纺聚合物薄膜的力学的详细描述，参见由CJ劳伦斯21的工作。 </li><li>使用适当的掩模，如在附录中提供的"口罩1.质子交换Mask.dxf"的文件，使用掩模对准器与一个350瓦汞灯泡或​​其同等10秒为每台机器specificati露出晶片附件。确保将晶片对准，使得波导是平行于y轴。 </li><li>开发在积极的光致抗蚀剂显影剂的抗蚀剂60秒。硬烤晶片在110℃下60秒。通过浸没它用于在1升溶液的铝蚀刻加热至50℃2分钟完全蚀刻掉暴露的铝。 注意:铝蚀刻是有毒的，腐蚀性的，有害的。见MSDS进行适当的处​​理和这种化学物质的存储。处理这种化学品时，使用适当的个人防护装备酸。 </li><li>与随后由异丙醇（IPA）丙酮漂洗除去光刻胶掩模。 </li><li>使用在0.016与0.165在曝光深度厚金刚石刀片。在自动切割锯，切割晶片切割成10×15毫米2的设备与平行于y轴的长尺寸。 注意:刀片不会削减一路通过基板。为了区分每个设备，只需强调了切割锯的每次晋级。每一个10×15mM的2-设备将通过协议的其余步骤单独去。 </li></ol> 2.质子交换<ol><li>放置一个单独的设备在试管用小孔磨成底部以允许该设备和所有的液体浴之间的相互作用。 </li><li>质子交换通过在240℃下浸渍在99％的纯苯甲酸1升熔融该设备。使用10分钟和10秒的浸渍时间，以达到的0.4504微米的目标深度。 注意:质子交换浸渍时间由扩散系数D，其为作者的熔体是目前D = 0.2993支配。质子交换浸渍时间是使用关系式T = D 2 /（4 D）的计算。在这个等式中，T是在小时的交换时间，d为在微米波导深度，D是扩散系数。质子交换的机制的详细描述，参见由JL Jackel公司1的工作5。 </li><li>删除该设备，并允许冷却5分钟或直到凉爽的感觉。清洁过用丙酮漂洗然后IPA任何苯甲酸残基。 </li></ol> 3.退火<ol><li>将设备以一个普通试管和包装在铝箔管。放置管在马弗炉中在375℃45分钟。删除该设备，并允许冷却5分钟或直到凉爽的感觉。 </li></ol> 4.清洁<ol><li>清洁使用铝蚀刻设备中的铝掩模在50℃下大约为2分钟。清洁设备在酸性食人鱼蚀刻去除有机残渣。 注意:酸性蚀刻食人鱼是有毒的，腐蚀性的，有害的。见MSDS进行适当的处​​理和这些化学品的储存。处理这些化学品时，使用适当的个人防护装备酸。 </li><li>冲洗设备丙酮，然后IPA，并用压缩氮气干燥。 </li></ol> 5.波导测量<ol><li>使用任何商业波导分析仪测量质子的特征交换波导。 注:良好的设备将有一个使用633纳米的激光制导2模式。参见图2为所希望的结果的一个例子。如果设备显示了红色照明多于两个引导模式则在步骤2.2的交换时间应该减小。同样，如果该装置示出了不少于两个导模的交换时间应该增加。 </li></ol> 6.添加抗<ol><li> 4滴电梯的转速为3000转，60秒熄灭光刻胶（LOR），然后在200℃烘烤1小时。取出并允许设备冷却5分钟或直到凉爽的感觉。上的3 4滴旋:以3000rpm进行60秒聚甲基丙烯酸甲酯（PMMA）和苯甲醚1溶液中，然后烘烤，在150℃下进行15分钟。 </li><li>取出并允许设备冷却5分钟或直到凉爽的感觉。旋上2滴导电性高分子的以1,000rpm60秒，然后旋转以6000rpm，持续4秒，以去除任何多余的。 </li></ol> 7.模式<ol><li>使用与波束阻断增强的电子显微镜，能写入或等同的机器，以暴露器件。 <ol><li>下50μTorr的真空，以30μC/ cm 2的面积的剂量，扫描叉指换能器的图案暴露导电层的电子束。要复制的效果，请使用410 Pa的测量电子束电流。 </li><li>从写在电子显微镜每台机器规格.DXF或等效的文件中的特征码。 注:对于电子束光刻过程的详细说明，请参见通过重新丰塔纳22所做的工作。 </li></ol></li></ol> 8.建立<ol><li>通过在去离子水为5秒的连续流漂洗所述设备中移除所述导电层。甲基异丁基3的解决方案:由设备浸入1拆下曝光PMMA升酮（MIBK）和IPA为45秒。 <ol><li>的MIBK 3溶液:从1除去IPA和用IPA冲洗5秒。干后用压缩氮气设备。 </li></ol></li><li>根据需要重复步骤8.1-8.1.1，全力发展PMMA。 注:然而，设备暴露于MIBK的解决方案:IPA仅5秒的增量。完整的开发应揭示PMMA下方的LOR，可以通过统一的着色整个清脆的棱角包围发达地区来确定。 注:在PMMA的发展导致小功能井喷，完全可以抹去的梳状手指留下一个大的发展区块。同样下发展留下非均匀残基会降低随后的剥离工艺的有效性。 </li><li>一个合适的开发商和去离子水为25秒1的解决方案:由设备浸入1暴露区域删除LOR。一个的都是适宜的解决方案1:从1移除Ë开发商和去离子水。用IPA冲洗5秒。 <ol><li>用干燥的压缩氮气。根据需要重复步骤8.3，充分发展的LOR。 注意:但是该装置暴露在仅2秒增量合适的显影剂和去离子水的溶液中。完整的开发应揭示LOR下方的衬底表面。它可以通过在整个发达地区统一的白色着色，同时保持清晰的棱角被识别。未能正确发展LOR也导致在8.2.3.1所讨论的问题。 图3给出了一个例子LOR的发展过程。 请注意:切换到适当的显影剂的对去离子水的低级比率如1:2或1:3是有帮助的设备接近完整的开发，以允许的优良特性，而不会吹出来的装置发展。然而，这不是有利的开始与这些剂量以总时间的增加并超过在DEVEL最佳时间OPER。 </li></ol></li></ol> 9.铝存款<ol><li>使用电子束蒸发器或等效机在50μTorr的真空，蒸发的铝200nm的晶片上以5埃/秒。 </li></ol> 10.起飞铝<ol><li>在90℃填充的热板上750毫升的水的大玻璃盘中。将塑料缓冲入水盘。在一个单独的小玻璃容器浸没设备中的100毫升溶液N-甲基-2-吡咯烷酮（NMP）的。 </li><li>放置的包含设备到塑料缓冲器确保水水平不超过NMP中的容器的高度NMP溶液的容器。盖上盖子，让坐在3〜4小时，或者直到铝升空完成。取下NMP设备。 注意:这是有利的距离的NMP浴移除之前清理掉的从装置铝大的部分。通过使用填充用NMP一个吸管喷出的装置的做到这一点ð收工不必要的铝剩余的大块。 </li><li>冲洗在IPA设备并用压缩氮气干燥。在显微镜下，验证升空完成。如果不需要的残留铝仍然存在，湿装置用丙酮和涂在丙酮中删除一个洁净棉签轻轻刷。 </li><li>在冲洗IPA，干着压缩氮气，并在显微镜下重新检查。重复10.3和10.4需要。 </li></ol> 11.波兰结束<ol><li>涂层中的保护膜的装置，例如正光致抗蚀剂的层。钳使得与换能器的端部露出的抛光设备。使用适当的抛光程序23中 ，装置的端部慢慢地抛光到小于100纳米的表面粗糙度，这样就没有表面缺陷与离开装置的光干扰。 </li><li>从夹子取下装置并清除保护膜。如果光致抗蚀剂作为保护膜，大方漂洗在丙酮中，然后将IPA删除它。干燥用压缩氮气作为必要的样品。 </li></ol> 12.安装上分线板<ol><li>如果需要的RF接口板装配任何根据其规格装配接口板。 </li><li>建设，走出玻璃幻灯片，安装平台，牢牢占据两个RF接口板和设备。注意:安装平台建在一个U形出三载玻片:一种75×50×1mm的3和两个75×25×1毫米3。 <ol><li>将强力胶慷慨珠在大溜的最左边第四位。将较小的幻灯片之一以上的强力胶珠，使最左边和底部边缘与大溜相应的边缘对齐。 </li><li>用力稳定和平等的压力，两个幻灯片，直到强力胶套，约15秒。重复该过程为大溜的最右边的第四位。 </li></ol></li><li>挂载为Device用双面胶带安装平台的顶部。确保设备悬垂的安装平台的端部的端部，使得所述安装平台不与光离开所述装置的端部干扰。 </li><li>安装射频接口板的安装平台，使得它不是在离开装置的光的光束路径。一个简单的方法，这样做是为了提升转接板厚厚的胶带，这样的接口板的底部是上述装置的顶部。 </li><li>丝焊设备上的焊盘上的射频接口板它们各自的位置。使用27 nH的串联电感阻抗匹配每个传感器的接口板输入。 </li></ol> 13.棱镜耦合<ol><li>选择一个金红石棱镜将光耦合到设备中。光（横向电场）的偏振应平行于X切割的铌酸锂的金红石光轴（Z轴）的光轴。 </li><li>清洁T字他联系设备，彻底用IPA棱镜两者的表面。以便它要测试的通道上居中的棱镜的位置。 </li><li>按棱镜的底部，使其紧贴该装置的顶部有一个夹持机构。注意:不要过度过度的压力会开裂衬底和损坏耦合棱镜。 </li><li>如果成功，观察湿点就会出现。 注意:湿点是在棱镜和样品之间的界面上受抑全内反射的区域。对于正确的棱镜耦合的一个例子见图4。 </li></ol> 14.在安装特性评价装置<ol><li>挂载由A. Henrie 4讨论各向异性漏模光调制器的分频颜色表征装置的旋转平台上的设备。 注意:表征装置的示意在图5中提供。 </li></ol><ol><li>开启激光器。复制本文使用5伏为638纳米，5.5 532nm的V中的结果，和6.5 V为445纳米。 </li><li>衰减光束直至散射光的强度是舒服的眼球。验证激光极化。 <ol><li>放置在光束路径中的偏振器的半波片，使得它阻止水平偏振光后。旋转半波片来实现的激光的最大衰减。拆下偏振器。 </li></ol></li><li>使得激光和该装置的顶面之间的角度被设置为适当的入射角手动旋转平台。 注意:适当的角度可以在表1中，根据所希望的检测波长和模式被发现。 </li><li>当激光的焦点穿过90°角的棱镜的使用线性平移阶段对准棱镜。注:增加激光SC引起的棱镜的角东北黑钙土有时可见到。 <ol><li>在这点上，灯应耦合成可以通过引起在波导散射或走出设备24的端部的特征模式的线光的特性条纹进行验证的装置（参见图6）。 注意:如果使用模式线验证耦合，是有帮助的从光束路径中删除功率计。代替插入一个均匀的散射物体，例如白纸的片材，进光束路径。 </li><li>如果没有检测到耦合，同时保持棱镜的偶合边缘在激光的焦点慢慢旋转设备。如果之后在任一方向五度的旋转，可以检测没有耦合，从旋转平台卸下设备，去掉棱镜，并返回到步骤13。 </li></ol></li><li>一旦连接被​​检测到，微调旋转平台和线性平移阶段MAXI迈兹的光的耦合。 </li></ol> 16.附上对RF输入，并附设备<ol><li>更换被定位在去除功率计。同时删除所有障碍物，以用于对准目的光束路径。 </li><li>附加RF输入设备接口板，并开启射频信号发生器。确保放大器供电。注意:为防止烧坏设备，信号到达设备的电能不应超过1 W. </li><li>取出校准过程中用于安全的任何衰减。激光现在是在用于测试的光功率电平。括在整个系统中的光学隔离框。 </li></ol> 17.运行提供测试方案<ol><li>获得的实验设备管理器来运行表征设备，如在附录中提供的LabView的文件AutomatedDeviceCharacterization.vi。 </li><li>将所有的用户参数进入测试SOFtware控制计算机上。注意: 图7是用于使用所提供的实验控制文件那些提供。它表示一个黄色的盒子，必须在每个自动测试之前更新的字段是为了运行所提供的分析程序在步骤19正常运行。 <ol><li>为了复制在本文介绍的效果，请使用以下测试参数:初始频率:100MHz，最终频率:800 MHz时，频率步:10，粗糙初始位置:0，粗糙最终位置:25和位置步骤:1。确保"输出到文件"按钮被按下。 </li></ol></li><li>运行测试程序。 注意:提供程序在用户定义的时间间隔沿着线性轨道驱动功率计。在每个位置上的RF输入信号被通过一组选择的频率和功率的测量都是由掠。的测量也与在其最低频率设置在RF输入和最低输出功率这一直实验作出LY确定为相当于没有输入信号4。这些测量值然后在实时绘制一三维交互表所示。 <ol><li>观察的四个输出文件:* config.csv描述的实验中，* data.csv包含在每个频率的功率读数，* no_stim.csv包含背景噪声读数，并且* graph.jpeg包含图形的用户副本该程序的界面，它是在节目结束的时候。参见图8。 </li></ol></li><li>重复部分15-17的每个波长，并在表1中记载的TE1模式。 </li></ol> 18.分析频率和角度输出配置文件<ol><li>获取统计分析程序或下载附件中提供的CompareWDMmodes.m MATLAB代码。 </li><li>在文件夹（其中程序所在），创建子文件夹，"样本编号"中输入"样本编号"进入测试程序。样本数是设备标识号。 </li><li>在此文件夹，"样本编号"，创建三个子文件夹。命名每个文件夹如下，"样本编号"_" 颜色"_M1_" 传感器"。在"粗体和斜体"的名称是进入用户测试程序的值。 （ 如 A16_BLUE_M1_T1，C5_RED_M1_T13或D35_GREEN_M1_T18）。 </li><li>成每个子文件夹，复制由测试软件与该特定波长，模态，和换能器对应创建的四个文件。 </li><li>打开的分析程序和改变用户定义的变量在顶部以反映用户定义的值输入到测试软件。 注意:如果使用所提供的分析程序，并在测试程序中的用户定义的值是"样本编号"= A16，"引导模式"= 1时，" 换能器"= 1的分析代码将被修改为以下: ; ％用户定义的变量 系列=&#39;A&#39;; 样品= 16; 模式= [1]; 传感器=&#39;T1&#39;; </li><li>运行分析程序。 注意:如果使用所提供的分析代码，除其他事项它创建用于比较归一化频率响应和用于红色，绿色和蓝色光的角输出的图。它创建该文件位于"样本编号"子文件夹。参见图9为输出的一个例子。 </li></ol>

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<li>Proklov, V., Korablev, E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Multichannel+waveguide+devices+using+collinear+acousto-optic+interaction%5BTitle%5D)+AND+%22Proc.+SPIE%22%5BJournal%5D)">Multichannel waveguide devices using collinear acousto-optic interaction.</a> Proc. SPIE. 1932, 298-311 (1993).</li>
<li>Ito, K., Kawamoto, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((An+optical+deflector+using+collinear+acoustooptic+coupling+fabricated+on+proton-exchanged+LiNbO+3%5BTitle%5D)+AND+%22Jpn.+J.+Appl.+Phys%22%5BJournal%5D)">An optical deflector using collinear acoustooptic coupling fabricated on proton-exchanged LiNbO 3.</a> Jpn. J. Appl. Phys. 37 (9R), 4858(1998).</li>
<li>Smalley, D., Smithwick, Q., Barabas, J., Jolly, S., DellaSilva, C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Holovideo+for+everyone%3A+a+low-cost+holovideo+monitor%5BTitle%5D)+AND+%22J+Phys+Conf+Ser%22%5BJournal%5D)">Holovideo for everyone: a low-cost holovideo monitor.</a> J Phys Conf Ser. 415 (1), 012055(2013).</li>
<li>McClaughlin, S., Leach, C., Henrie, A., Smalley, D., Jolly, S., Bove, V. Frequency Division of Color for Holovideo Displays using Anisotropic Leaky Mode Couplers. Optical Society of America, 2015. , DM2A-2 (2015).</li>
<li>McLaughlin, S., Leach, C., Henrie, A., Smalley, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Optimized+guided-to-leaky-mode+device+for+graphics+processing+unit+controlled+frequency+division+of+color%5BTitle%5D)+AND+%22Appl.+Opt%22%5BJournal%5D)">Optimized guided-to-leaky-mode device for graphics processing unit controlled frequency division of color.</a> Appl. Opt. 54 (12), 3732-3736 (2015).</li>
<li>Jackel, J., Rice, C., Veselka, J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Proton+exchange+for+high-index+waveguides+in+LiNbO3%5BTitle%5D)+AND+%22Appl.+Phys.+Lett%22%5BJournal%5D)">Proton exchange for high-index waveguides in LiNbO3.</a> Appl. Phys. Lett. 41 (7), 607-608 (1982).</li>
<li>Wong, K. <a target="_blank" href="http://scholar.google.com/scholar?hl=en&safe=off&q=author%3aWong%2C+K+%22Properties+of+lithium+niobate%22">Properties of lithium niobate</a>. , IET. London. (2002).</li>
<li>Tien, P., Ulrich, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Theory+of+prism-film+coupler+and+thin-film+light+guides%5BTitle%5D)+AND+%22JOSA%22%5BJournal%5D)">Theory of prism-film coupler and thin-film light guides.</a> JOSA. 60 (10), 1325-1337 (1970).</li>
<li>Tsai, C. <a target="_blank" href="http://scholar.google.com/scholar?hl=en&safe=off&q=author%3aTsai%2C+C+%22Guided-wave+acousto-optics%3A+interactions%2C+devices%2C+and+applications%22">Guided-wave acousto-optics: interactions, devices, and applications</a>. , Springer Science & Business Media. Heidelberg. (1990).</li>
<li>Proklov, V., Korablev, E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((Multichannel+waveguide+devices+using+collinear+acousto-optic+interaction%5BTitle%5D)+AND+%22Proc.+SPIE%22%5BJournal%5D)">Multichannel waveguide devices using collinear acousto-optic interaction.</a> Proc. SPIE. 1932, 298-311 (1993).</li>
<li>Li, R. <a target="_blank" href="http://scholar.google.com/scholar?hl=en&safe=off&q=author%3aLi%2C+R+%22Circuit+Design%22">Circuit Design</a>. , John Wiley & Sons. Hoboken. (2012).</li>
<li>Lawrence, C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((The+mechanics+of+spin+coating+of+polymer+films%5BTitle%5D)+AND+%22Phys.+Fluids%22%5BJournal%5D)">The mechanics of spin coating of polymer films.</a> Phys. Fluids. 31 (10), 2786-2795 (1988).</li>
<li>Fontana, R., Katine, J., Rooks, M., Viswanathan, R., Lille, J., MacDonald, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((E-beam+writing%3A+a+next-generation+lithography+approach+for+thin-film+head+critical+features%5BTitle%5D)+AND+%22IEEE+Trans.+Magn%22%5BJournal%5D)">E-beam writing: a next-generation lithography approach for thin-film head critical features.</a> IEEE Trans. Magn. 38 (1), 95-100 (2002).</li>
<li>Robertson, M. <a target="_blank" href="http://scholar.google.com/scholar?hl=en&safe=off&q=author%3aRobertson%2C+M+%22Substrate+Surface+Preparation+Handbook%22">Substrate Surface Preparation Handbook</a>. , (2011).</li>
<li>Monneret, S., Flory, F., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/pubmed?term=((M-lines+technique%3A+prism+coupling+measurement+and+discussion+of+accuracy+for+homogeneous+waveguides%5BTitle%5D)+AND+%22J+Opt+A-Pure+Appl+Op%22%5BJournal%5D)">M-lines technique: prism coupling measurement and discussion of accuracy for homogeneous waveguides.</a> J Opt A-Pure Appl Op. 2 (3), 188(2000).</li>
</ol>

作者什么都没有透露。

每个器件的设计有两个关键步骤，质子交换和LOR中的发展。两个的，质子交换时间决定了波导，这反过来又决定了引导到漏模的转换，可控频率带宽，以及用于光的每一种颜色的每个关键设计参数的数量的深度。在红二导模需要。如果有更多的存在，那么带宽牺牲。如果少存在，那么没有被引导到泄漏模式过渡的保证。按照步骤2.2.1的说明纠正质子交换倍，达到预期的效果。 合适的LOR发展所需的适当剥离和叉指换能器，从而正确功能。它是通过经验最好掌握了一步。开发商的非稀溶液会烧坏换能器的手指在7秒，而50％的溶液会做同样在约35秒。确切的时间从设备而异创造必要设备开发，持续25秒的装置在50％的溶液中，接着反复快速暴露于更多的稀溶液。如果出现井喷式发展减少时间和溶液浓度，以达到预期的效果。 在表征过程棱镜耦合和对齐是关键步骤。如果设备不好棱镜耦合或不良对准没有光会进入波导使其无法衡量的结果。对准最好用小的调整来实现的。在散射光的变化可以指示方式，以模式线或显示叉指换能器的附近。经验是最好的老师。 该协议被设计为单个设备中的用途。作为这样的可扩展性是有限的和小变化将是从设备​​本到设备。然而，笔者正在积极争取晶圆驱动的制造工艺，将克服这一挑战的发展。另一个limitat这种定性协议的离子是一个积极的测试过程的依赖。叉指换能器必须有一个大的带宽，以适应在波导深度和模式转换的变化。一旦过渡频率确定一个窄的带宽换能器进行设计。该过程一个好的模型将消除这个步骤的需要。最后，该测试协议不是完全自动的，因此需要在波长和设备的变化之间的人力调整。 一旦一个设备同时显示良好的角重叠和频率控制，则它能够在这样的应用中作为3D holovideo显示器1使用。这些设备仅需要2图案形成步骤，以制造这是今天的共同的显示技术，诸如像素化光阀，MEMS器件，和体波的声光调制器的大的改善。这是作者的希望，有机会获得这个制造，测量和CHaracterization协议将鼓励electroholographic显示研究更广泛的参与。

最全息显示技术，诸如像素化光阀以及MEMS器件和体波的声光调制器，过于复杂，以允许在其发展广泛参与。像素化调节剂，尤其是那些具有滤光层和有源背平面，可能需要几十图案形成步骤以生成5，并且可以通过扇出6的限制。图案形成步骤的数量越大越高设备的复杂性，以及更严格的制造协议必须要达到合理的器件产率7。体波声光调制器不适合自己在片基础的过程8,9。各向异性泄漏模式调制器，然而，仅需要两个构图步骤来制作和使用相对标准的微细加工技术10,11。这些方法的可访问性有可能使用温和的制造设施的任何机构参与h的发展olographic视频显示技术的12。 器件制造的简易性可以是诱人的，但是，由于该设备的正常功能是强烈地依赖于它必须仔细地测量和调整，以实现期望的器件特性的波导。例如，如果波导太深，该设备的操作带宽将会缩小13。如果该波导太浅，该设备可能无法对红色照明工作。如果波导退火时间过长，波导的深度轮廓的形状会失真，并且红色，绿色和蓝色的转换可以不坐在频域中14相邻。在这项工作中作者提出的工具和技术来执行此鉴定。 泄漏模式调制器由一个质子交换波导indiffused压电的表面上，X切割的铌酸锂基片15,16。在一端的波导是铝叉指换能器， 见图1。光被引入到使用棱镜耦合器17的波导。该换能器然后启动表面声波随光中沿着y轴的波导contralinearly交互。这引导光线进入该泄漏出波导进入批量，最后退出从边缘衬底的泄漏模式的互动夫妇面对18,19。这种相互作用也从旋转偏振TE引导光的偏振极化TM泄露模式的光。表面声波模式的全息图，并且它是能够扫描和整形的输出光，以形成全息图象的。 波导是由质子交换创建。首先，铝被沉积在衬​​底上。然后铝被图案化光致光刻和蚀刻以暴露所述衬底的区域成为波导通道。剩余的铝用作硬面具。的基板浸渍在苯甲酸的熔融从而改变在曝光区域的表面折射率。该装置被移除，清洗和在马弗炉中退火。波导的最终深度决定漏模的转换次数。波导深度还确定每个引导到模式转换的每种颜色4的频率。 铝换能器通过剥离形成。形成波导之后，电子束抗蚀剂被旋涂在衬底上。一个叉指式换能器被用电子束图案，以形成一个线性调频传感器旨在到负责控制在波导器件色200 MHz频段响应。手指周期由Λƒ= v，其中，Λ，是指周期，V确定为声音在衬底的速度和，ƒ，是射频（RF）。该换能器将有必须匹配到75欧姆有效操作20的阻抗。 &lt;P类="j​​ove_content"&gt;该引导到漏模相互作用发生在用于照明的光的不同波长的不同的频率，因此红色，绿色和蓝色光可以在频域中进行控制。被发送到叉指式变换器的RF信号所产生的声表面波的图案。该输入信号的RF转换为在表面声波模式的空间频率。波导可被制造，使得低频信号控制红色光的角扫描和幅度，而中间频率控制绿光和高频控制蓝光。作者已经确定了一套波导的参数允许所有三种这些相互作​​用是在频域中分开和相邻的，使所有三种颜色可以与它的商品的图形处理单元的最大带宽（单个200MHz的信号来控制图形处理器）。 由GPU信道的带宽匹配到一个漏模调制器，系统变得完全平行和高度可扩展的。通过增加带宽配对GPU和漏模式调制器的渠道，人们可以构造任意大小的全息显示器。 创建设备之后，它被小心地表征，以验证是否为引导到漏模过渡频率是适合于彩色的频率控制。首先，将引导模式的位置是由一个商业棱镜耦合确定为确认该波导具有适当的深度和引导模式的正确数量。然后，该装置被安装并包装后，它们被放置在定制棱镜耦合器映射扫描输出的光的输入频率。所得数据给出的频率输入响应和用于红色，绿色和蓝色光的器件进行测试的角的输出响应。如果设备已经正确制造，该装置输入响应将被分离频率和输出响应会在角重叠。当此确定后，该设备已准备好用于在全息视频显示器使用。 该设备已被打包前的第一次测量进行。波导深度是由商业棱镜耦合来确定。这可以只用一个照明波长来完成（一般632纳米红色），但作者已经修改了其商业棱镜耦合，以允许它收集为红色，绿色和蓝色光的模式信息。包装后，该装置经受一个定制棱镜耦合其中记录偏转输出光作为输入RF的功能的第二次测量。这些测量的详细说明如下。还给出制造步骤。

<table><tbody><tr><td>X-Cut Lithium Niobate</td><td>Gooch and Housego</td><td>99-00630-01</td><td>Lithium Niobate 3&amp;Prime; Diameter X-CUT Wafer 1&amp;nbsp;mm Polish/Polish</td></tr><tr><td>Positive Photo Resist 1</td><td>EMD Performance Materials</td><td>AZ 3330 F Photoresist</td><td>Used in the creation of the proton exchange mask</td></tr><tr><td>Photoresist Developer</td><td>EMD Performance Materials</td><td>AZ MIF 300</td><td>Develops AZ3330 and LOR 3A</td></tr><tr><td>Aluminium</td><td>International Advanced Materials</td><td>AL13</td><td>99.999% pure</td></tr><tr><td>Aluminium Etch</td><td>Transene</td><td>Type A Aluminum Etchant</td><td></td></tr><tr><td>Benzoic Acid</td><td>Sigma Aldrich</td><td>109479-500G</td><td>99% pure</td></tr><tr><td>Acetone</td><td>Fisher Chemical</td><td>UN1009</td><td></td></tr><tr><td>IPA</td><td>Fisher Chemical</td><td>UN1219</td><td>99.5% pure isopropyl alcohol</td></tr><tr><td>Acidic Piranha etch</td><td>Cyantek Corperation</td><td>Nanostrip</td><td></td></tr><tr><td>Under Layer Resist</td><td>Micro Chem</td><td>LOR 3A</td><td>Bottom layer used for liftoff</td></tr><tr><td>Positive Photo Resist</td><td>Micro Chem</td><td>950 PMMA A9</td><td>Top layer used for liftoff</td></tr><tr><td>Anisole</td><td>Micro Chem</td><td>A Thinner</td><td></td></tr><tr><td>Conductive polymer aqueous solution</td><td>Mitsubishi Rayon Company</td><td>AquaSAVE</td><td></td></tr><tr><td>MIBK (4-methyl-2-pentanone)</td><td>Sigma Aldrich</td><td>360511</td><td>Develops PMMA</td></tr><tr><td>NMP (1-methyl-2-pyrrolidone)</td><td>Sigma Aldrich</td><td>328634</td><td>Used for liftoff</td></tr><tr><td>E-beam Evaporator&amp;nbsp;</td><td>Denton Vacuum&amp;nbsp;</td><td>Integrity 20</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Thin Film Spinner</td><td>Laurell Technologies Corporation</td><td>WS-400A-6NPP-LITE</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Mask Aligner&amp;nbsp;</td><td>Karl Suss America Inc.</td><td>MA 150 CC</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Automatic Dicing Saw&amp;nbsp;</td><td>Disco Corperation</td><td>Disco Dad 320</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Muffle Furnace</td><td>Thermo Scientific</td><td>FB1415M</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Electron Microscope</td><td>FEI</td><td>XL30 ESEM</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Dehydration Oven</td><td>Lab-Line Instruments&amp;nbsp;</td><td>Ultra-Clean 100&amp;nbsp; (3497M-3)</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Hot Plate</td><td>Thermo Scientific</td><td>SP131325</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Polisher</td><td>Ultra Tec Mfg., Inc.</td><td>Ultrapol End &amp;amp; Edge Polisher</td><td>Any equivalent equipment would suffice.</td></tr><tr><td>Class IIIb 12&amp;nbsp;V RBG Lasers: Wavelengths (nm): 638, 532, and 445</td><td></td><td></td><td>Bought second-hand. Probably pulled from a laser projector. Any equivalent equipment would suffice.</td></tr><tr><td>Signal Generator</td><td>Agilent</td><td>8648D</td><td>Now found at Keysight. Obsolete. Any equivalent equipment would suffice. Needed Frequency sweep 9 kHz-1,000 MHz.</td></tr><tr><td>Signal Amplifier</td><td>Mini-Circuits</td><td>TB-17</td><td>Necessary only to overcome the limitations of the signal generator.</td></tr><tr><td>Power Meter Controller</td><td>ThorLabs</td><td>PM100D</td><td>With power meter model S130C. Any equivalent equipment would suffice. Needed sensitivity 500&amp;nbsp;pW.</td></tr><tr><td>Linear Actuator Controller</td><td>Newport</td><td>ESP7000</td><td>With linear actuator model MFN25PP. Any equivalent equipment would suffice. Needs 0.1&amp;nbsp;mm accuracy.</td></tr><tr><td>AutomatedDeviceCharacterization.vi&amp;nbsp;</td><td>LabView</td><td>Experimental Control Software by BYU</td><td>Found in the appendix</td></tr><tr><td>CompareWDMmodes.m</td><td>MATLab</td><td>Analytical Software by BYU</td><td>Found in the appendix</td></tr></tbody></table>

characterization of anisotropic leaky mode modulators for holovideo

Holovideo displays are based on light-bending spatial light modulators. One such spatial light modulator is the anisotropic leaky mode modulator. This modulator is particularly well suited for holographic video experimentation as it is relatively simple and inexpensive to fabricate1-3. Some additional advantages of leaky mode devices include: large aggregate bandwidth, polarization separation of signal light from noise, large angular deflection and frequency control of color1. In order to realize these advantages, it is necessary to be able to adequately characterize these devices as their operation is strongly dependent on waveguide and transducer parameters4. To characterize the modulators, the authors use a commercial prism coupler as well as a custom characterization apparatus to identify guided modes, calculate waveguide thickness and finally to map the device's frequency input and angular output of leaky mode modulators. This work gives a detailed description of the measurement and characterization of leaky mode modulators suitable for full-color holographic video.

上述协议的原理结果是从在图2中，单个频率中所示的商业棱镜耦合器中的引导模式测量， 如图8所示从定制棱镜耦合收集原始输入/输出数据，并在图9中所示的多色曲线。在下面的段落中，我们讨论由每个这些输出的所产生的可操作的信息。 从商用棱镜耦合收集的引导模式信息被使用，主要是，以建立波导深度，但是模式的数目和它们的间距包含有关泄漏模式操作的其它有用的信息。对于所设计的漏模设备工作，它必须为每一个彩色一个引导到漏水的模式转换，和实验已经显示出这是真实的时，有存在于每个Illumina的至少两个引导模式化波长。这是特别相关的为红色，因为它有三个显示颜色的最少导引模式。质子交换步骤2应该增加或减少，以确保有两个红色模式。在一般情况下，在红色具有两个模式表明还有在绿色和蓝色的至少两个模式。对于彩色的频分复用优化的设备已经显示在红色两种模式，在绿色三种模式和蓝色四种模式。少模式，可能会出现的绿色和蓝色的，如果退火时间过长。如果大于模的最佳数量较少出现绿色和蓝色光，则在步骤3中的退火时间可能需要延长。长退火，但是，也将减少引导模式的有效折射率。 如图8中的自定义棱镜耦合器的原始输出给出一个很好的定性意义的一些重要的设备的参数，如射频带宽，角扫描，扫描线性度，光斑大小，驻波周期和近似的衍射效率。在Y轴的数据的投影给出从中可以读出的中心频率和操作的近似带宽装置的频率响应。在X轴上的数据的投影给出了衍射光输出的跨度。该位置信息是几乎正比于装置输出的角扫描，以便在此轴上的投影装置的角扫描的良好指标。在图上的XY平面上的数据的斜率为我们提供了扫描的线性度感以及扫描具有输入频率的速率。如果X轴以足够高的分辨率进行采样，然后沿X轴的截面将给出的束分布曲线。如果在Y轴以足够高的分辨率进行采样，然后表面声波驻波图案可以成为apparent-如果它们是突出，它可能是有利的一个声吸收添加到装置，以产生一光滑，均匀扫描。绝对衍射效率不会测量，但一台设备进行比较到另一个时，所述信噪比用作相对衍射效率的良好指标。这个原始数据提供的信息的显著量，但它是有关只有一个照明波长。 以确定该设备是否能够进行彩色的频率控制的，原始数据被处理为几个实验与所有三种波长，以形成像在图9的曲线图。X和Y轴突起首先收集所有TE1引导模式三种颜色。然后这些预测被叠加在角度和频率分别轴形成多色频率和类似所示的尖角响应。如果每种颜色的响应在频率上相邻和重叠在角，则该设备适合于彩色的频率控制。 <p<html>类="jove_content"FO:保together.within页="1"&gt;通过使用在这项工作中所描述的表征步骤，一个是既可以能够重现色彩变频调速装置，以及有效地修改它们的功能，以满足新的优化标准诸如最大化衍射效率，高信噪比或高线性度。 <img alt="图1" src="/files/ftp_upload/53889/53889fig1.jpg" /> 图1:泄漏模式调制器如所看到的左侧，光通过金红石棱镜其中渐逝耦合光到indiffused基板的表面上的波导输入装置。作为引导的光传播朝向它遇到表面声波从该波导outcouple的光并旋转其偏振装置的远端。此交互的势头示意图右侧给出。<html> ge.jpg"目标="_空白"&gt;点击此处查看该图的放大版本。 <img alt="图2" src="/files/ftp_upload/53889/53889fig2.jpg" /> 图2:样品波导数据从激光器的光耦合到棱镜。然后将其反射离开该装置的并到达一个功率传感器的表面上。当一个导模的存在，而不是反射离开器件的光穿过衬底和出该装置的端部引导。因此，它是从功率传感器引导远离和一个尖"浸"在剧情发生。有在该地块确定了两个模式。从逐渐增加的功率读数从左到右可以通过在空气棱镜边界逐渐增大传输效率来解释。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig2large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> 帐篷"FO: - together.within页保留="1"&gt; <img alt="图3" src="/files/ftp_upload/53889/53889fig3.jpg" /> 图3:样品LOR发展过程中设备作为LOR的同一地区图像十分发达。最左边的照片是最初的25秒时间的发展后，在显微镜下拍摄的。下面的照片是通过迭代过程的变化的采样。最后的画面的精细化设备上的特写LOR发展后展现整齐的边缘和底层基板的曝光。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig3large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> <img alt="图4" src="/files/ftp_upload/53889/53889fig4.jpg" /> 图4:棱镜耦合器件安装在分线板 。经过正确加之，完成设备安装到其布雷亚KOUT板。在合适的角度，因为在这张照片中，湿点反映了缤纷的色彩。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig4large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> <img alt="图5" src="/files/ftp_upload/53889/53889fig5.jpg" /> 图5:表征的装置示意图表征装置的基本框图。激光是通过一系列的光学部件通过棱镜耦合到装置之前发送。一旦由叉指式变换器产生的波导SAW波模式和RF信号里面敲进光泄漏模式哪个退出的频率可控的角度装置。而信号发生器贯穿一个频率范围内创建，它描述可控性和多变量进行图形的线性驱动器驱动通过一系列职位的功率计放的设备。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig5large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> <img alt="图6" src="/files/ftp_upload/53889/53889fig6.jpg" /> 图6:适当光耦合的鉴定技术正确的耦合可以通过由散射引起的波导，在左侧所示的光的特性条纹的任一存在来识别，或者由所述特征模式线出来的端部设备上，显示在右侧。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig6large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> <img alt="图7" src="/files/ftp_upload/53889/53889fig7.jpg" /> 图7:用户界面的LabView测试软件的用户间<html>脸部，包括所有的用户定义的变量。每个自动化测试是为了运行分析程序正常运行前，黄盒装物品必须被更新。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig7large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> <img alt="图8" src="/files/ftp_upload/53889/53889fig8.jpg" /> 图8:样本频率与位置图形虽然在RF输入和功率计的位置是线性扫描，实验软件构建和显示所收集的数据的这个交互式3D图形。完成后当前视图保存为快速参考。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig8large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> /53889fig9.jpg"/&gt; 图9:示例的模式比较的数据被显示在左侧的三个波长的频率响应。该装置具有200兆赫为每个波长单独控制的带宽。在右边是每个器件的输出角度响应。有5-7°角好重叠。 <a href="https://www-jove-com.remotexs.ntu.edu.sg/files/ftp_upload/53889/53889fig9large.jpg" target="_blank">请点击此处查看该图的放大版本。</a> <table fo:keep-together.within-page="1"><tbody><tr><td> 波长 </td><td> 模式 </td><td> 角度 </td></tr><tr><td> 638纳米</td><td> TE0 </td><td> 23° </td></tr><tr><td></td><td> TE1 </td><td> 28° </td></tr><tr><td> 532纳米</td><td> TE0 </td><td> 26° </td></tr><tr><td></td><td> TE1 </td><td> 31° </td></tr><tr><td></td><td> TE2 </td><td> 32° </td> &lt;/ TR&gt; <tr><td> 445纳米</td><td> TE0 </td><td> 31° </td></tr><tr><td></td><td> TE1 </td><td> 36° </td></tr><tr><td></td><td> TE2 </td><td> 38° </td></tr><tr><td></td><td> TE3 </td><td> 39° </td></tr></tbody></table> 表1:模式激励参数角度和波长参数本文档中讨论的装置所需的TE1模式激励。

Watch this Scientific Journal Video about Characterization of Anisotropic Leaky Mode Modulators for Holovideo at JoVE.com

Characterization of Anisotropic Leaky Mode Modulators for Holovideo

各向异性泄漏模式调制器用于Holovideo的表征

This work describes fabrication and characterization of anisotropic leaky mode modulators for holographic video.

Holovideo displays are based on light-bending spatial light modulators.  One such spatial light modulator is the anisotropic leaky mode modulator.  This ...

characterization-of-anisotropic-leaky-mode-modulators-for-holovideo

Nanyang Technological University

Research

JoVE Journal

Engineering

7.9K 次观看.  Brigham Young University. This work describes fabrication and characterization of anisotropic leaky mode modulators for holographic video.

视频: Characterization of Anisotropic Leaky Mode Modulators for Holovideo

Development of Whispering Gallery Mode Polymeric Micro-optical Electric Field Sensors

Optical modes of dielectric micro-cavities have received significant attention in recent years for their potential in a broad range of applications. The optical modes are frequently referred to as "whispering gallery modes" (WGM) or "morphology dependent resonances" (MDR) and exhibit high optical quality factors. Some proposed applications of micro-cavity optical resonators are in spectroscopy1, micro-cavity laser technology2, optical communications3-6 as well as sensor technology. The WGM-based sensor applications include those in biology7, trace gas detection8, and impurity detection in liquids9. Mechanical sensors based on microsphere resonators have also been proposed, including those for force10,11, pressure12, acceleration13 and wall shear stress14. In the present, we demonstrate a WGM-based electric field sensor, which builds on our previous studies15,16. A candidate application of this sensor is in the detection of neuronal action potential.
The electric field sensor is based on polymeric multi-layered dielectric microspheres. The external electric field induces surface and body forces on the spheres (electrostriction effect) leading to elastic deformation. This change in the morphology of the spheres, leads to shifts in the WGM. The electric field-induced WGM shifts are interrogated by exciting the optical modes of the spheres by laser light. Light from a distributed feedback (DFB) laser (nominal wavelength of ~ 1.3 &mu;m) is side-coupled into the microspheres using a tapered section of a single mode optical fiber. The base material of the spheres is polydimethylsiloxane (PDMS). Three microsphere geometries are used: (1) PDMS sphere with a 60:1 volumetric ratio of base-to-curing agent mixture, (2) multi layer sphere with 60:1 PDMS core, in order to increase the dielectric constant of the sphere, a middle layer of 60:1 PDMS that is mixed with varying amounts (2% to 10% by volume) of barium titanate and an outer layer of 60:1 PDMS and (3) solid silica sphere coated with a thin layer of uncured PDMS base. In each type of sensor, laser light from the tapered fiber is coupled into the outermost layer that provides high optical quality factor WGM (Q ~ 106). The microspheres are poled for several hours at electric fields of ~ 1 MV/m to increase their sensitivity to electric field.

A high-sensitivity photonic micro sensor was developed for electric field detection. The sensor exploits the optical modes of a dielectric sphere. Changes in the external electric field perturb the sphere morphology leading to shifts in its optical modes. The electric field strength is measured by monitoring these optical shifts.

回音壁模式聚合物微光学电场传感器的发展

Optical modes of dielectric micro-cavities have received significant attention in recent years for their potential in a broad range of applications. The ...

科研

工程学

Quasi-light Storage for Optical Data Packets

Today's telecommunication is based on optical packets which transmit the information in optical fiber networks around the world. Currently, the processing of the signals is done in the electrical domain. Direct storage in the optical domain would avoid the transfer of the packets to the electrical and back to the optical domain in every network node and, therefore, increase the speed and possibly reduce the energy consumption of telecommunications. However, light consists of photons which propagate with the speed of light in vacuum. Thus, the storage of light is a big challenge. There exist some methods to slow down the speed of the light, or to store it in excitations of a medium. However, these methods cannot be used for the storage of optical data packets used in telecommunications networks. Here we show how the time-frequency-coherence, which holds for every signal and therefore for optical packets as well, can be exploited to build an optical memory. We will review the background and show in detail and through examples, how a frequency comb can be used for the copying of an optical packet which enters the memory. One of these time domain copies is then extracted from the memory by a time domain switch. We will show this method for intensity as well as for phase modulated signals.

The article describes a procedure to store optical data packets with an arbitrary modulation, wavelength, and data rate. These packets are the basis of modern telecommunications.

准光存储光学数据包

Today's telecommunication is based on optical packets which transmit the information in optical fiber networks around the world. Currently, the processing ...

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

紧凑的镜头少数字全息显微镜的MEMS检测与表征

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Automation of Mode Locking in a Nonlinear Polarization Rotation Fiber Laser through Output Polarization Measurements

When a laser is mode-locked, it emits a train of ultra-short pulses at a repetition rate determined by the laser cavity length. This article outlines a new and inexpensive procedure to force mode locking in a pre-adjusted nonlinear polarization rotation fiber laser. This procedure is based on the detection of a sudden change in the output polarization state when mode locking occurs. This change is used to command the alignment of the intra-cavity polarization controller in order to find mode-locking conditions. More specifically, the value of the first Stokes parameter varies when the angle of the polarization controller is swept and, moreover, it undergoes an abrupt variation when the laser enters the mode-locked state. Monitoring this abrupt variation provides a practical easy-to-detect signal that can be used to command the alignment of the polarization controller and drive the laser towards mode locking. This monitoring is achieved by feeding a small portion of the signal to a polarization analyzer measuring the first Stokes parameter. A sudden change in the read out of this parameter from the analyzer will occur when the laser enters the mode-locked state. At this moment, the required angle of the polarization controller is kept fixed. The alignment is completed. This procedure provides an alternate way to existing automating procedures that use equipment such as an optical spectrum analyzer, an RF spectrum analyzer, a photodiode connected to an electronic pulse-counter or a nonlinear detecting scheme based on two-photon absorption or second harmonic generation. It is suitable for lasers mode locked by nonlinear polarization rotation. It is relatively easy to implement, it requires inexpensive means, especially at a wavelength of 1550 nm, and it lowers the production and operation costs incurred in comparison to the above-mentioned techniques.

A protocol to detect and automate mode locking in a pre-adjusted nonlinear polarization rotation fiber laser is presented. The detection of a sudden change in the output polarization state when mode locking occurs is used to command the alignment of an intra-cavity polarization controller in order to find mode-locking conditions.

锁模自动化的非线性偏振旋转光纤激光器通过输出偏振测量

When a laser is mode-locked, it emits a train of ultra-short pulses at a repetition rate determined by the laser cavity length. This article outlines a ...

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and avoiding both failure and stiction). LDV enables crucial measurements that are impossible with the network analyzer, such as higher mode detection (highly sensitive biosensor application) and resonance measurement for very small devices (fast prototyping). Accordingly, LDV was used to characterize the frequency tuning range and resonance frequency at different modes of the MEMS filters built for this study. This wide range frequency tuning mechanism is based simply on Joule heating from the embedded heaters and relatively high thermal stress with respect to the temperature of a fixed-fixed beam. However, we demonstrate that another limitation of this method is the resulting high thermal stress, which can burn the devices. Further improvement was achieved and shown for the first time in this study, such that the tuning capability was increased by 32% through an increase in the applied DC bias voltage (25 V to 35 V) between the two adjacent beams. This important finding eliminates the need for the extra Joule heating at the wider frequency tuning range. Another possible failure is through stiction and requirement of structure optimization: We propose a simple and easy technique of low frequency square wave signal application that can successfully separate the beams and eliminates the need for the more sophisticated and complicated methods given in the literature. The above findings necessitate a design methodology, and so we also provide an application-based design.

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

高效宽量程可调谐 MEMS 滤波器的设计与表征方法

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

An Electrochemical Cholesteric Liquid Crystalline Device for Quick and Low-Voltage Color Modulation

We demonstrate a method for fabricating a prototype reflective display device that contains cholesteric liquid crystal (LC) as an active component. The cholesteric LC is composed of a nematic LC 4&#39;-pentyloxy-4-cyanobiphenyl (5OCB), redox-responsive chiral dopant (FcD), and a supporting electrolyte 1-ethyl-3-methylimidazolium trifluoromethanesulfonate (EMIm-OTf). The most important component is FcD. This molecule changes its helical twisting power (HTP) value in response to redox reactions. Therefore, in situ electrochemical redox reactions in the LC mixture allow for the device to change its reflection color in response to electrical stimuli. The LC mixture was introduced, by a capillary action, into a sandwich-type ITO glass cell comprising two glass slides with patterned indium tin oxide (ITO) electrodes, one of which was coated with poly(3,4-ethylenedioxythiophene)-co-poly(ethylene glycol) doped with perchlorate (PEDOT+). Upon application of +1.5 V, the reflection color of the device changed from blue (467 nm) to green (485 nm) in 0.4 s. Subsequent application of 0 V made the device recover the original blue color in 2.7 s. This device is characterized by its fastest electrical response and lowest operating voltage among any previously reported cholesteric LC device. This device could pave the way for the development of next generation reflective displays with low energy consumption rates.

A protocol for the fabrication of a reflective cholesteric liquid crystalline display device containing a redox-responsive chiral dopant allowing quick and low-voltage operation is presented.

一种用于快速和低压彩色调制的电化学胆固醇液晶器件

We demonstrate a method for fabricating a prototype reflective display device that contains cholesteric liquid crystal (LC) as an active component. The ...

化学

Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator

The aim of this article is to visually demonstrate the utilization of an interferometric method for encoding complex fields associated with coherent laser radiation. The method is based on the coherent sum of two uniform waves, previously encoded into a phase-only spatial light modulator (SLM) by spatial multiplexing of their phases. Here, the interference process is carried out by spatial filtering of light frequencies at the Fourier plane of certain imaging system. The correct implementation of this method allows arbitrary phase and amplitude information to be retrieved at the output of the optical system.
It is an on-axis, rather than off-axis encoding technique, with a direct processing algorithm (not an iterative loop), and free from coherent noise (speckle). The complex field can be exactly retrieved at the output of the optical system, except for some loss of resolution due to the frequency filtering process. The main limitation of the method might come from the inability to operate at frequency rates higher than the refresh rate of the SLM. Applications include, but are not limited to, linear and non-linear microscopy, beam shaping, or laser micro-processing of material surfaces.

We show how to encode the complex field of laser beams by using a single phase element. A common-path interferometer is employed to mix the phase information displayed into a phase-only spatial light modulator to finally retrieve the desired complex field pattern at the output of an optical imaging system.

利用相位空间光调制器建立激光光束的振幅和相位

The aim of this article is to visually demonstrate the utilization of an interferometric method for encoding complex fields associated with coherent laser ...

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

We present a technique to fabricate simple thickness mode piezoelectric devices using lithium niobate (LN). Such devices have been shown to atomize liquid more efficiently, in terms of &#64258;ow rate per power input, than those that rely on Rayleigh waves and other modes of vibration in LN or lead zirconate titanate (PZT). The complete device is composed of a transducer, a transducer holder, and a &#64258;uid supply system. The fundamentals of acoustic liquid atomization are not well known, so techniques to characterize the devices and to study the phenomena are also described. Laser Doppler vibrometry (LDV) provides vibration information essential in comparing acoustic transducers and, in this case, indicates whether a device will perform well in thickness vibration. It can also be used to &#64257;nd the resonance frequency of the device, though this information is obtained more quickly via impedance analysis. Continuous &#64258;uid atomization, as an example application, requires careful &#64258;uid flow control, and we present such a method with high-speed imaging and droplet size distribution measurements via laser scattering.

Fabrication of piezoelectric thickness mode transducers via direct current sputtering of plate electrodes on lithium niobate is described. Additionally, reliable operation is achieved with a transducer holder and &#64258;uid supply system and characterization is demonstrated via impedance analysis, laser doppler vibrometry, high-speed imaging, and droplet size distribution using laser scattering.

用于原子化和抗波流体的厚度模式压电器件的制造和特性

We present a technique to fabricate simple thickness mode piezoelectric devices using lithium niobate (LN). Such devices have been shown to atomize liquid ...

Demonstration of Spin-Multiplexed and Direction-Multiplexed All-Dielectric Visible Metaholograms

The optical holography technique realized by metasurfaces has emerged as a novel approach to projective volumetric display and information encryption display in the form of ultrathin and almost flat optical devices. Compared to the conventional holographic technique with spatial light modulators, the metahologram has numerous advantages such as miniaturization of optical setup, higher image resolution and larger field of visibility for holographic images. Here, a protocol is reported for the fabrication and optical characterization of optical metaholograms that are sensitive to the spin and direction of incident light. The metasurfaces are composed of hydrogenated amorphous silicon (a-Si:H), which has large refractive index and small extinction coefficient in the entire visible range resulting in high transmittance and diffraction efficiency. The device produces different holographic images when the spin or direction of incident light are switched. Therefore, they can encode multiple types of visual information simultaneously. The fabrication protocol consists of film deposition, electron beam writing and subsequent etching. The fabricated device can be characterized using a customized optical setup that consists of a laser, a linear polarizer, a quarter waveplate, a lens and a charge-coupled device (CCD).

We present a protocol for fabrication of spin- and direction-multiplexed visible metaholograms, then conduct an optical experiment to verify their function. These metaholograms can easily visualize encoded information, so they can be used for projective volumetric display and information encryption.

旋转多路复用和方向多路复用全介电可见元全息图的演示

The optical holography technique realized by metasurfaces has emerged as a novel approach to projective volumetric display and information encryption ...

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Microfluidic systems have enabled powerful new approaches to high-throughput biochemical and biological analysis. However, there remains a barrier to entry for non-specialists who would benefit greatly from the ability to develop their own microfluidic devices to address research questions. Particularly lacking has been the open dissemination of protocols related to photolithography, a key step in the development of a replica mold for the manufacture of polydimethylsiloxane (PDMS) devices. While the fabrication of single height silicon masters has been explored extensively in literature, fabrication steps for more complicated photolithography features necessary for many interesting device functionalities (such as feature rounding to make valve structures, multi-height single-mold patterning, or high aspect ratio definition) are often not explicitly outlined. 
Here, we provide a complete protocol for making multilayer microfluidic devices with valves and complex multi-height geometries, tunable for any application. These fabrication procedures are presented in the context of a microfluidic hydrogel bead synthesizer and demonstrate the production of droplets containing polyethylene glycol (PEG diacrylate) and a photoinitiator that can be polymerized into solid beads. This protocol and accompanying discussion provide a foundation of design principles and fabrication methods that enables development of a wide variety of microfluidic devices. The details included here should allow non-specialists to design and fabricate novel devices, thereby bringing a host of recently developed technologies to their most exciting applications in biological laboratories.

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.

多级可变高度的光刻多层带瓣微流体装置

Microfluidic systems have enabled powerful new approaches to high-throughput biochemical and biological analysis. However, there remains a barrier to ...