Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars
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8.9K Views
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08:02 min
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February 11th, 2020
DOI :
February 11th, 2020
•Rozdziały w tym wideo
0:04
Introduction
1:08
Cavity Design and Wafer Cleaning
2:17
Photolithography
3:15
Silica (SiO2) and Silicon (Si) Layer Etching
4:30
Thermal Oxide Growth and Etching
6:00
Results: Representative Wetting Behaviors of Gas-Entrapping Microtextures (GEMs)
7:08
Conclusion
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