10.6K Views
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08:59 min
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September 27th, 2019
DOI :
September 27th, 2019
•0:04
Title
1:02
DNA Origami Assembly
1:34
Substrate Preparation
2:09
Amorphous Silicon (a-Si) Layer Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Oxygen Plasma Treatment
2:49
DNA Origami Deposition
3:44
Silicon Dioxide (SiO2) Mask Growth
4:38
Reactive Ion Etching (RIE)
5:25
Physical Vapor Deposition (PVD)
6:35
Hydrofluoric Acid (HF) Liftoff
7:05
Remaining a-Si RIE
7:38
Results: Representative Bowtie DNA Origami Imaging and Functional Analyses
8:15
Conclusion
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