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Nanyang Technological UniversityDesign and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
6.1K Views
•
15:25 min
•
February 4th, 2018
DOI :
February 4th, 2018
•Chapters in this video
0:00
Title
2:51
Selecting and Designing Optimum Structure
3:31
Modeling and Fabrication on CMOS
5:39
Device Testing: Thermal Camera Test for Embedded Heaters
6:27
Device Testing: Calibrating LDV and Test Setup
9:19
Device Testing: Testing 68μm Long MEMS Filters via LDV
10:32
Device Testing: Higher Mode Measurement
11:01
Avoiding Device Failures
11:45
Avoiding Failures: High Thermal Stress and Burning
12:10
Boosting The Tuning Capability
13:16
Results
14:07
Conclusion
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