JoVE Journal
Engineering
This content is Open Access.
11.8K Views
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11:10 min
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May 23rd, 2018
DOI :
May 23rd, 2018
•0:04
Title
0:56
Atomic Layer Deposition (ALD) of Amorphous Vanadium Dioxide (VO2 ) on Sapphire Substrates
3:06
Annealing Amorphous VO2 Thin Films
4:45
Characterization of VO2 Films by Raman Spectroscopy
5:43
Characterization of VO2 Films by X-Ray Photoelectron Spectroscopy (XPS)
7:31
Morphological Characterization by Atomic Force Microscopy (AFM)
9:06
Results: Characterization of Amorphousand Crystalline VO2 Films
10:49
Conclusion
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