Design und Charakterisierung Methodik für effiziente Weitbereichs-abstimmbaren MEMS-Filter

2:51

Selecting and Designing Optimum Structure

3:31

Modeling and Fabrication on CMOS

5:39

Device Testing: Thermal Camera Test for Embedded Heaters

6:27

Device Testing: Calibrating LDV and Test Setup

9:19

Device Testing: Testing 68μm Long MEMS Filters via LDV

10:32

Device Testing: Higher Mode Measurement

11:01

Avoiding Device Failures

11:45

Avoiding Failures: High Thermal Stress and Burning

12:10

Boosting The Tuning Capability

13:16

Results

14:07

Conclusion